Frontiers of Characterization and Metrology for Nanoelectronics: 2007 International Conference on Frontiers of Characterization and Metrology

Authors: David G. Seiler, Alain C. Diebold, Robert Mcdonald, C. Michael Garner, Dan Herr, Rajinder P. K
Publisher: American Institute of Physics
Edition: 1
Publish Year: 2007
ISBN: 9780735404410

As the semiconductor industry continues to move toward silicon nanoelectronics and beyond, the introduction of new materials, innovative processing and assembly, and novel devices brings formidable metrology challenges. This book emphasizes the frontiers of innovation in the characterization and metrology needed to advance nanoelectronics.